FACILITIES
ATOMC LAB OF ZJU
FACILITIES
2
Chemical Vapor Transport (CVT) System
Low-Pressure Chemical Vapor Deposition (LPCVD) System for CNT
2
Low-Pressure Chemical Vapor Deposition (LPCVD) System for BN
2
Low-Pressure Chemical Vapor Deposition (LPCVD) System for TMDC
3
Atmospheric Pressure Chemical Vapor Deposition (APCVD) System
2
Ultra-High Temperature Chemical Vapor Deposition (UHTCVD) System
Wafer-level Fully Automatic Chemical Vapor Deposition (CVD) System
1
1
...
Material synthesis
Horiba Nanolog
PL, PLE, lifetime
Keysight 4200
1
1
1
1
2
1
1
Raman-TERS (Tip-Enhanced Raman Spectrometer)
Photoluminescence Spectrometer (PL)
Atomic Force Microscope (AFM)
Scanning Electron Microscope (SEM)
Transmission Electron Microscope (TEM)
UV-Vis-NIR Optical Absorption Spectrometer
Cathodoluminescence Spectrometer (CL)
Thermogravimetric Analyzer (TGA)
1
Material characterization
Aberration
corrected TEM
Thermal Gravity Analysis
UV-vis-NIR
optical absorption
Shimadzu
3600i plus
...
1
Vacuum cryogenic probe station
Semiconductor parameter analyzer
Room temperature probe station
Thermal evaporation system
Electron Beam Lithography (EBL)
Electron beam evaporation system
Magnetron sputtering system
Maskless photo-lithography system
1
2
1
1
1
1
1
Device fabrication&characterization
EBL
Raman spectroscopy + nanolog PL
Aberration corrected TEM/STEM
...
3
1
1
1
Optical microscope
Ultracentrifuge
High-speed centrifuge
Glovebox inert gas interconnection system
Others
SEM
SEM-ebeam
...
Zhejiang University
Address : 866 Yuhangtang Rd, Hangzhou 310058, China
Prof. office: Kaiwuyuan 5-346, Zijingang Campus
Material Synthesis Lab.: West campus building #4, Room 124, Zijingang campus
Characterization Lab.: Jingongzhongxin Room 106, Zijingang campus
