FACILITIES

ATOMC LAB OF ZJU

FACILITIES

2

Chemical Vapor Transport (CVT) System

Low-Pressure Chemical Vapor Deposition (LPCVD) System for CNT

2

Low-Pressure Chemical Vapor Deposition (LPCVD) System for BN

2

Low-Pressure Chemical Vapor Deposition (LPCVD) System for TMDC

3

Atmospheric Pressure Chemical Vapor Deposition (APCVD) System

2

Ultra-High Temperature Chemical Vapor Deposition (UHTCVD) System

Wafer-level Fully Automatic Chemical Vapor Deposition (CVD) System


1

1

...

Material synthesis

Horiba Nanolog

PL, PLE, lifetime






Keysight 4200






1

1

1

1

2

1

1

Raman-TERS (Tip-Enhanced Raman Spectrometer)

Photoluminescence Spectrometer (PL)

Atomic Force Microscope (AFM)

Scanning Electron Microscope (SEM)

Transmission Electron Microscope (TEM)

UV-Vis-NIR Optical Absorption Spectrometer

Cathodoluminescence Spectrometer (CL)

Thermogravimetric Analyzer (TGA)

1

Material characterization

Aberration 

corrected TEM


Thermal Gravity Analysis


UV-vis-NIR 

optical absorption

Shimadzu 

3600i plus



...

1

Vacuum cryogenic probe station

Semiconductor parameter analyzer

Room temperature probe station

Thermal evaporation system

Electron Beam Lithography (EBL)

Electron beam evaporation system

Magnetron sputtering system

Maskless photo-lithography system

1

2

1

1

1

1

1

Device fabrication&characterization

EBL

Raman spectroscopy  +  nanolog PL


Aberration corrected TEM/STEM

...

3

1

1

1

Optical microscope

Ultracentrifuge

High-speed centrifuge

Glovebox inert gas interconnection system

Others

SEM


SEM-ebeam


...

Zhejiang University


Address :                       866 Yuhangtang Rd, Hangzhou 310058, China

Prof. office:                       Kaiwuyuan 5-346, Zijingang Campus

Material Synthesis Lab.:   West campus building #4, Room 124, Zijingang campus

Characterization Lab.:      Jingongzhongxin Room 106, Zijingang campus




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