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ATOMIC LAB OF
ZJU
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Wafer-level Fully Automatic Chemical Vapor Deposition (CVD) System
Ultra-High Temperature Chemical Vapor Deposition (UHTCVD) System
Atmospheric Pressure Chemical Vapor Deposition (APCVD) System
Low-Pressure Chemical Vapor Deposition (LPCVD) System for TMDC
Low-Pressure Chemical Vapor Deposition (LPCVD) System for BN
Low-Pressure Chemical Vapor Deposition (LPCVD) System for CNT
Chemical Vapor Transport (CVT) Syste
Material synthesis
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Thermogravimetric Analyzer (TGA)
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Cathodoluminescence Spectrometer (CL)
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UV-Vis-NIR Optical Absorption Spectrometer
Transmission Electron Microscope (TEM)
Scanning Electron Microscope (SEM)
Atomic Force Microscope (AFM)
Photoluminescence Spectrometer (PL)
Raman-TERS (Tip-Enhanced Raman Spectrometer)
Material characterization
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Maskless photo-lithography system
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Magnetron sputtering system
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Electron beam evaporation system
Thermal evaporation system
Electron Beam Lithography (EBL)
Semiconductor parameter analyzer
Room temperature probe station
Vacuum cryogenic probe station
Device fabrication&characterization
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Glovebox inert gas interconnection system
High-speed centrifuge
Ultracentrifuge
Optical microscope
Others
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Jingongzhongxin Room 106, Zijingang campus
Characterization Lab.:
West campus building #4, Room 124, Zijingang campus
Material Synthesis Lab.:
Kaiwuyuan 5-346, Zijingang Campus
Prof. office:
866 Yuhangtang Rd, Hangzhou 310058, China
Address :
Zhejiang University
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